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Post CMP Cleaning: Aqueous Cleaning
of Al, Cu & W wafers Application Notes: NuGeneration Technologies’ Wafer product line has been formulated with the needs of the industry in mind. All of our products are manufactured using the highest-grade raw materials with 18 MOhm DI water then filtered to meet customers’ requirements before packaging. Our products are cost effective i.e. formulated for extended bath life, contain no VOC’s or chelates, are safe to use (contain NO Prop 65 or SARA 313 ingredients and most products contain only non-hazardous ingredients), biodegradable and are easily disposed(1) of thereby reducing the cost of waste treatment. The NuWet and NuKlean line of aqueous wafer cleaners were formulated to provide improved removal of particulates, organics and metallics while providing reduced residues, and fast rinsing. NuWet and NuKlean products are non-corrosive on aluminum, copper and tungsten based wafers and may be used in ultrasonic, megasonic and scrub cleaning processes. Typical usage parameters:
Physical Properties:
* Diluted NuWet 133 take on pH of water. Typical value listed. Storage: Keep out of direct sunlight. Keep from freezing. Store between 40-120 ° F. (1)Disposal: Dispose of in accordance with local, state, & federal regulations. For assistance with disposal contact NuGeneration Technologies at 888-99-NuGen or e-mail: Info@nugentec.com.
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